1. After completing the course, student can explain the basic concepts of sensor theory and technology, classification of sensors, properties of ideal and real sensors, pros and cons of integrated smart sensor systems, and the interface between sensor and measurement electronics.
2. Student can explain the main fabrication methods, including thin-film technologies, micromachining methods, wet and dry etching techniques, and both laser and ion beam milling methods and their applications in microsensor fabrication.
3. Students can explain the basic structures, physical operation principles, and fabrication processes of main sensor types for different forms of energy.
2. Student can explain the main fabrication methods, including thin-film technologies, micromachining methods, wet and dry etching techniques, and both laser and ion beam milling methods and their applications in microsensor fabrication.
3. Students can explain the basic structures, physical operation principles, and fabrication processes of main sensor types for different forms of energy.
- Lärare: Jari Hannu
- Lärare: Jarkko Tolvanen